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The effect of graphite cylinder inserted between the hollow Ta cathode and focusing coil in an hollow cathode discharge (HCD) gun on abnormal discharge prevention was investigated.When the graphite cylinder was inserted, no abnormal discharge was observed. In contrast, for the HCD gun without the graphite cylinder, an abnormal discharge on 7 times during plasma coating for 200 h was observed. These abnormal discharges were classified into 4 types; (1) a small variation in beam voltage (4 times), (2) a large variation in beam voltage (1 time), (3) HCD gun related type (1 time), and (4) HCD apparatus itself or coating condition related type (1 time).With the discharge of type (1), the TiN film peeled off in the area of the abnormal discharge, although it was possible to continue TiN coating. However, with discharges of the more serious types (2) - (4), TiN coating had to be stopped.Scanning electron microscopic observation of the TiN films in the area of the abnormal discharge showed a spiral-like morphology that was swollen by 100-400 μm longitudinally and by 60-100 μm transversely. The swollen area of the TiN film was extensively cracked, and a part had peeled off.

Abnormal Discharge Prevention by Insertion of Graphite Cylinder the Hollow Ta Cathode and Focusing Coil in Horizontal High-current Electron Beam Gun.