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There have been increasing efforts for the development of compact and miniaturized oxygen sensor for various applications including multianalyte sensor and sensors with a reliable and accurate monitoring of oxygen concentration in controlled environments requiring measurements under low oxygen concentration. This work has been devoted to the development of structurally integrated luminescence quenching based sensors, the structure comprising of Organic Light Emitting Diode (OLED) as excitation source, oxygen sensitive dyes as the sensing element and PECVD based thin film photodiodes for detection. The whole structure can also be extended towards the development on flexible substrates. The developed sensor is less cumbersome and bulky and easy to use compared to the existing sensors. The commonly used Clark electrode for measuring dissolved oxygen suffers from interference from the ambient, requires frequent maintenance and electrolyte change, and also consumes oxygen during the measurement resulting in a little inaccurate measurement and hence restricts the resolution of the sensor. In addition the whole set-up is very bulky, which further motivates the development of these luminescence-based sensors. Another advantage of these luminescence-based sensors is the ease of tunability of sensitivity for different oxygen levels merely by changing the sensor dye. This work has been devoted mainly to the development of appropriate thin film, low temperature grown thin film photodiodes optimized for best possible performance of the whole sensor configuration. In addition the three component integration issues were solved by overcoming all the challenges due to electromagnetic noise generated by the OLED, interfering with the photodiode response and hence limiting the sensitivity. Amorphous silicon/silicon germanium and nanocrystalline silicon thin films were characterized for better performance in photodiodes. The sensitivity spectrums of the photodiodes were engineered to have maximum sensitivity around 640nm and minimum around 535nm, which is the peak emission wavelength of OLED. This process development resulted in enhanced immunity of the photodiode to the background resulting in enhanced sensitivity.

Structurally integrated luminescence based oxygen sensors with Organic LED/ oxygen sensitive dye and PECVD grown thin film photodetectors