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Transparent and highly conducting amorphous and crystalline Al doped ZnO thin films were grown on glass substrate at room temperature by RF magnetron sputtering. The structural, electrical, morphological and optical properties of amorphous and crystalline Al doped ZnO thin films were studied. The XRD pattern revealed that the crystalline film corresponds to hexagonal wurtzite structure with (002) preferred orientation.

Deposition of Amorphous and Crystalline Al doped ZnO Thin Films by RF Magnetron Sputtering and their Comparative Properties