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In order to develop the flat-plate micro-atomizer, the flat-plate micro-atomizer based on Ansys software was simulated. In this paper, the primary research work is to discuss three types of electrode configurations. It includes plate-plate, multineedle-plate and screen mesh. They have effect on the characteristic of flat-plate micro-atomizer. Three types of electrode parameters have effect on the characteristic of flat-plate micro-atomizer, such as the electrode thickness, steel needle diameter, distribution distance of steel needle, length of steel needle, screen mesh size and other parametersit. The simulation results show that the discharge density unit would be easy to obtain by many factors, such as the smaller electrode thickness, the smaller steel needle diameter, the smaller distribution of steel needle and the closer mesh. The longer the length of the needle is, the larger current density of the discharge have. Under the same condition, comparison of three types of electrode structure can be know that the current density covered on the screen mesh’s electrode is much larger than the plate-plate and multineedle-plate. Keywords—micro-atomizer; dielectric barrier discharge; ansys simulation; ectrode structure; density of discharge

Performance Analysis and Comparison of three Kinds of Electrode Structure for Micro-atomizer