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This paper analyzes the performance of aerostatic thrust bearing working in low-vacuum condition using Computational Fluid Dynamics (CFD) software Fluent. Load Carrying Capacity (LCC), stiffness, gas leakage of the bearings with different geometrical structures are calculated and the results indicate that gas leakage can be reduced greatly by double exhaust slots, smaller film thickness, wider exhaust slot and larger slot distribution radius. The conclusions of the paper can be used for the designing of aerostatic thrust bearing used in vacuum condition. Keywords-Aerostatic thrust bearing; Exhaust slot; Low-vacuum condition

CFD Investigation on the Performance of Aerostatic Thrust Bearing With Exhaust Slots Used in Low-vacuum Condition