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Hydrochloric acid solution of TiCl3 was synthesized by reacting of Ti powders and hydrochloric acid in highpressure reactor at 145°C. After vacuum drying TiCl3·6H2O crystalline were obtained. TiCl3·6H2O crystalline and urea, being as nitrogen source, were put into the vacuum slowly vapor deposition reactor. The heating temperature and holding time were 600°C and 10 min separately. The deposited powders at different temperature were analyzed by X-ray diffraction (XRD). The results show: Ti2N powders can be synthesized at the range of 450°C to 600°C. The powders deposited at low temperature ( < 80°C) were NH4Cl and the organics decomposed from urea. Keywords-urea; TiCl3; vacuum slow deposition; TiN

Synthesis o f Ti2N Powders by Vacuum Slowly Vapor Deposition Using Urea as Nitrogen Source