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Based on the numerical calculation method, a program is designed to solve the field distributions and equipotential lines in a electrostatic immersion objective. Then the characteristics are discussed. Successive approximation method is used to solve the finite difference equation of field distributions and the scan-line searching method is used to solve the coordinate of equipotential lines. Results from the program show that the rotationally symmetric electric field is characterized by nonuniformity so that the electron beam can be focused and imaged. Also axial potential distributions are nonlinear to produce a radial force and equipotential lines are distributed in a saddle on the nearby axial extreme point of potential. The program offers a exact and effective way to design the electrostatic immersion objective.

Field-Distribution’s CAD and Characteristics of Electrostatic Immersion Objective