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paper, accuracy improvement in the displacement measurement systems using Doppler- interferometry method is presented. The cross-talk error reduction methods are also discussed. Based on the mentioned method, a new nano-displacement measurement system is designed. In the designed system, the signal to leakage ratio for moving targets in the range of -20m/s to +20m/s is increased to 55dB. The measured phase detection error is equal to 7.9 degree in the normal condition, and after the cross-talk error reduction it is reduced to 0.11 degree. As a result, the displacement measurement error is decreased from 6.9nm to 0.1nm.

Accuracy Improvement in the Nano-Displacement Measurement Based on the Doppler-Interferometry Method by Cross-talk Reduction