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In this paper, WO3, SnO2 semiconductor materials and their monometallic and binary metal surface modification counterparts was prepared. Resistance-type Sensors were made by MEMS technology and screen printing, whose resistance signals for mustard gas detection were collected by single-chip microcomputer and LABVIEW control soft. Top nine binary metal modification materials were selected out and their best work temperature, ultra violet light irradiation influence, repeatability and stability were researched. Curve fitting equation between top 9 materials SM and mustard concentration CHD was acquired, which would help us to calculate or estimate the unknown CHD by SM value from test.

Sulfur Mustard Detection with Binary Metal Modification on WO3, SnO2 Semiconductor Substrate Surface