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The planar 3-RRR compliant mechanism is a piezoelectric (PZT) actuator driven 3DOF parallel micro-motion device. It is widely used in micro-electromechanical systems, biotechnology engineering and aerospace. However, crack easily occurs on flexure hinge because alternate loading over a long period of time, which will compromise mechanism's accuracy. This paper presents a method for crack detection based on the pseudo rigid body model (PRBM). Particularly, the location of cracked hinge can be identified from the obtained force's variation on piezoelectric actuator of healthy and cracked configurations, while theirs elongation remaining the same. This research has good uses including fault diagnosis, facility for the real-time control and optimization of design of a compliant mechanism.

Crack Detection Method on Flexure Hinges of 3-RRR Compliant Mechanism