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Micro tool manufacturing technology is the key for guaranteeing the manufacturing accuracy of micro milling cutter. According to the relative motion relationship and the meshing condition between the grinding wheel and the workpiece, the changes of normal vector of the intersection point for the grinding wheel generatrix was analyzed, and the equation of common contact line was established. Further, using the rotating cross-sectional shape formed by the rotation of contact line around the workpiece axis, the profile equation of the axial cross-sectional shape of the milling tool was deduced. During the process, a method of compensate deflection at z axis is proposed, through the calculation of bending deformation of the workpiece in grinding process. Experiments show that rake angle and core thickness of micro milling cutter obtained after the compensation, are good agreement with the simulation shape of the helical goove.

Research on micro compensation grinding method of helical groove for micro mill