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Gas sensor is needed to detect and the presence of gas, either for toxic gas or non toxic gas. The one of the important part in gas sensor instrument is the metal oxide. There are some ways to make metal oxide for sensing material of gas sensor; the one is sol-gel process. The purpose of this experiment is to make zinc oxide by sol-gel process. Zinc acetate dehydrate is dissolved in diethylene glycol and heated up to 130 0C until a clear solution is obtained. After adding de-ionized water under vigorous stirring the resulting mixture is heated at 180 0C for 2 hours. After drying at 400 0C for 2 hours and annealing at 600 0C for 1 hour, a yellow fine powder is obtained, which is identified by using XRD and SEM. From this observation, Zinc Oxide has been formed in nano size range, it is around 100 nanometer as the major phase with homology peak value of XRD between ZnO standard and product is 98.

Synthesis of Indium Oxide (In2O3) Nano Particles Using Sol Gel Method as Active Material on Gas Sensor