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At present, by existing sensors, sub-μN micro-force in micro-assembl y is not able to be reliably measured. In this paper, using PVDF film as the sensitive element and using micro-force sensor based on PVDF as the research object are to establish the model of PVDF sensor and analyze the relationship between output charge of PVDF and the force acting on it. Then to design the corresponding signal processing circuit, then simulate the circuit. Simulation results show design of the signal processing circuit is effective and modeling of PVDF sensor is correct. Thus, the paper provides a feasible solution in micro-force sensing and feedback control for micro-assembly and micro-manipulation.

Modeling, Design and Simulation of Micro-Force Sensor Based on PVDF