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Femtosecond pulsed laser(800nm, 120fs, 1000Hz) was used. And methods of element doping, abaxially rolling and moving were applied. Problems of conflict between transmission and inner-stress, and large area asymmetric of diamond like carbon (DLC) films deposited by pulsed laser were overcome. Hydrogen-free DLC film was deposited on silicon substrates. The transmission at 3-5μm of the silicon sample coated by DLC film on one side was larger than 68%. The nano-hardness was up to 40-50GPa. Asymmetry of DLC film in size of φ125mm was smaller than 2%. Furthermore there was no nicks on the film after rubbed 105 times by 9.8N rubber.

Research of Anti-reflective and Protective Symmetrical DLC Films Deposited by Pulsed Laser