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Focus variation is an optical contact-free method that allows the measurement of 3D surface metrology using optics with limited depths of field and vertical scanning. It was documented in the ISO 25178-6 for the first time in 2010. Based on this method, two categories of typical instruments are described in two aspects: hardware part and software part. The latter part is the core technology of focus variation, including image fusion, 3D model construction and image mosaic, which are closely related to the key parameters used in the process of measurement such as exposure time, contrast and analyser. In this paper, two groups of applications were selected to demonstrate the capabilities of the instruments using different measurement parameters including measurements on cutting-insert tools, stainless steel ball, stepped workpiece, reference specimens and so on. Some principles were concluded for optical 3D surface measurement with focus variation after comparing the practical results with different parameters, serving as measurement strategies.

Influence analysis of microscopic image quality in surface topography