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During the process of warm water isostatic pressing process, the internal micro-channels fabricated in Low Temperature Co-fired Ceramic (LTCC) substrate are prone to collapse. In this paper, a three-dimensional model of LTCC microwave component is established by the finite element software ABAQUS, and the micro-channel deformation is studied by the simulation analysis of warm water isostatic pressing process. Results show that pressure is the main factor that leads to the deformation of micro-channel, and temperature is followed. At the same time, the microchannel with large width-height ratio-aspect ratio has large deformation. Choose smaller pressure 18 MPa and high temperature 80 ℃, microchannel deformation can be controlled below 15%.

Simulation Analysis of Microchannel Deformation during LTCC Warm Water Isostatic Pressing Process