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According to basic electromagnetic theory, the response of a capacitive sensor depends on the structural parameters of the sensor and the dielectric permittivity between the plates. Here, the effect on the response of a capacitive sensor is investigated by changing its structural parameters. In the experiments, a nozzle is used to make wet steam and to control its humidity. A heating method is used to calibrate humidity of the steam. A Schmitt oscillation circuit is used to measure the capacitance of the sensors. Three sensors with different structural parameters are investigated. The standard k-e turbulence model, the wall function and the Semi-Implicit Method for Pressure Linked Equations (SIMPLE) algorithm are used to simulate the coupled performance of the electric field and the flow field in different structured sensors. There was a linear relationship with the humidity of the steam and the capacitance of the humidity sensor decreased with an increasing plate thickness. The capacitance change ratio was dependent on the humidity of the steam and increased with an increasing plate length. The capacitance change ratio decreased with an increasing plate separation. The stability and error of the sensors increased as the ratio between the plate length and plate separation increased. The linear relationship between the capacitance of the sensors and the steam humidity increased initially and then decreased as the ratio between the plate length and plate separation increased..

Investigating the effect of changing the structural parameters of capacitive sensors on their response to the humidity of steam