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In this paper, a fine stage based on parallel mechanism was developed for 3-DOF error compensation to improve the form accuracy of the workpiece. This mechanism with 3-DOF motions in the plane was designed as the parallel structure for minimization and high structural stiffness. The static and dynamic stiffness analysis of the developed flexure-based mechanism have been conducted to verify the validity in displacement of workspace in the X- and Y- directions. For accurate positioning, the effect by Abbe's offset between the measuring and driving coordinate system was analyzed and minimized. The displacement of piezoelectric actuators was determined from the measured data and inverse kinematic. The performance of the developed fine stage was evaluated through the basic performance evaluation.

Development and Performance Evaluation of Fine Stage for 3-DOF Error Compensation