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. With the practical application of silicon micro-machined gyro driven by rotation aircraft, it is found that the rotation aircraft’s rudder surface vibration significantly influences the performance of the gyro. In this paper, as the background of the silicon micro-machined gyro, the vibration mechanism is analyzed according to the mathematics model and dynamics. Under the influence of vibration, both of the silicon pendulum's stress form and output signal are obtained. The paper proposes a reasonable installation method to suppress the vibration. The experimental result shows that the method is effective to reduce the gyro’s output signal noise. And the result is good.

The Research of Vibration Suppression Method for Silicon Micro-machined Gyro Driven by the Rotation Aircraft