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The machine vision measurement system was established to measure 2D sizes of parts. The 5 Megapixels CCD sensors, bi-telecentric lenses, telecentric back illumination and image acquisition modes were chosen to establish hardware part, according to the requirement of views and precision. The software system was developed to extract the edge of the part from the digital image and transform it to a polynomial curve. The optimal estimation of expected value and the measured value was calculated based on contour tangential continuity, to eliminate the effects of random error. The gauge block set was set on the four quadrants of the visual field, and their edges were extracted. Distortion correction and system calibration was done combining with the distortion model. The actual size of each pixel is 4.584μm after using subdivision, Kalman filter, distortion correction and calibration. Tests and analyses show that the measurement precise is ±3μm class.

Random and Systematic Errors Correction of Micron-sized Machine Vision Measurement System