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m thick DLC multilayer films were deposited on W9 high-speed steel with deep cryogenic pre-treatment (DCT) for 30 hours in liquid nitrogen by unbalanced magnetron sputtering technique, which were compared with the DLC films without DCT. The results show that compound systems with DCT exhibit higher film-substrate bonding strength and superior friction wear property, which are closely related to the DCT effect that martensitic transformation and decomposition, grain refinement and carbides precipitation. Thus the hardness, strength and residual stress of substrate are improved remarkably, and deformation compatibility between film and substrate under external load become more coordinating. Meanwhile, surface morphology of substrate is effectively adjusted by phase transformation, as a result, element diffusion and mechanical interlocking effect of film-substrate interface are optimized with added grain boundary and fine uniform organization.

Effect of Deep Cryogenic Pre-treatment for Substrates on Mechanical Property of DLC Films