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New manufacturing chains for precise fabrication of asphere and freeform optical surfaces including atmospheric Plasma Jet Machining (PJM) technology will be presented. PJM is based on deterministic plasma-assisted material removal. It has the potential for flexible and cost-efficient shape generation and correction of small and medium-sized optical freeform elements. The paper discusses the interactions between the plasma tools and optical fused silica samples in the context of the pre-machined and intermediate surface states and identifies several plasma jet machining methods for freeform generation, surface correction, and finishing as well as suitable auxiliary polishing methods. The successful application of either processing chain is demonstrated.

New freeform manufacturing chains based on atmospheric plasma jet machining