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It has been established, that proton-exchanged LiNbO3 waveguides have a marked subsurface layer with structural disorder inducing degradation of electro-optical properties of these waveguides. At the same time, such a subsurface disorder is found to be less pronounced in soft proton-exchanged (SPE) waveguides in comparison with annealed proton-exchanged (APE) ones. The experimental samples of phase modulators fabricated by SPE technique exhibit a better electro-optical efficiency compared to the LiNbO3 modulators produced by the standard and improved APE techniques.

Subsurface disorder and electro-optical properties of proton-exchanged $\text{LiNbO