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Femtosecond-laser ablation for the microfabrication of 30- to 300-µm -wide grooves with a depth to width ratio up to 2 in stainless steel was investigated. A laser based on Yb:KGW with 300-fs pulse duration, 350-kHz repetition rate and 6-W average power was used. The influence of micromachining strategies, scanning methods and beam shapes on the precision and the speed of material removal were studied. Laser-induced-breakdown spectroscopy was used to monitor the micromachining process. The choice of the scanning pattern was found important to form rectangular grooves with high precision in high fluency ablation conditions.

Optimization of Laser-Ablation Micromachining by Choice of Scanning Algorithms and Use of Laser-Induced-Breakdown Spectroscopy