Open Access
Development of Optically-Driven Metallic Microrotors Using Two-Photon Microfabrication
Journal Of Laser Micro/nanoengineeringPeer ReviewedTakashi Ikegami2013Journals
We have developed metallized, cross-shaped microrotors driven by scanning a low-power laser beam. The metallized microrotors were fabricated by the combination of two-photon microfabrication, electroless plating and laser ablation. It is demonstrated that a cross-shaped, metallized microrotor can be driven at a laser power of 3 mW. We also analyze the radiation pressure exerted on the blade to investigate the driving mechanism of the metallized micorotor. As a result, it was confirmed that a tilted blade could generate larger torque than a horizontal blade due to the reflection of an incident Gaussian laser beam. Such optically driven metallized micromachines will be useful for low-cost, functional lab-on-a-chip devices.

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