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A silica micro-cantilever with intrinsically defined channel waveguide containing Bragg gratings has been fabricated using a combination of direct UV writing and physical micromachining. Through optically monitoring the response of the Bragg gratings defined within the cantilever, induced stresses can be measured at multiple locations along its length permitting multiplexed physical sensitivity. The fabricated silica cantilever is 61 µm wide, 41 µm thick and 3 mm in length. It contains three Bragg gratings and can attain ~70 nm deflection resolution.

Physical Sensitivity of Silica Micro-Cantilevers Fabricated Using Direct UV Writing and Micromachining