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In order to solve the problem of precise positioning at micron level, a hydraulic system using servo motor and displacement amplifier hydraulic cylinder instead of servo valve is proposed. The simulation results show that the open-loop response speed of the system can be improved by increasing the elastic modulus of the oil and reducing the viscosity of the oil, while the pressure and volume of the accumulator have no obvious influence on the open-loop performance of the system. The micro displacement control hydraulic system is applied to the integrated test-bed, and PD controller is selected as the position controller according to the identification results. The validity and feasibility of the micro displacement control hydraulic system are verified.

OPTIMIZATION AND RESEARCH ON HYDRAULIC CONTROL SYSTEM OF MACHINING EQUIPMENT WORKTABLE