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In this paper we investigate a new design of high sensitivity photonic crystal temperature sensor (PCTS). A square lattice of silicon (Si) rods immersed in air matrix is used as a basic structure. The designed sensor consists of two inline quasi-waveguides which are coupled to a resonant cavity (RC). The sensing principle is based on Si refractive index change caused by the variation of the temperatures over a range from 0 to 80◦C. This variation leads to an important shift in the resonance wavelength. The performance of the suggested temperature sensor has been analyzed and studied using finite-difference time domain (FDTD) method. The results show that our designed structure offers a high sensibility of 93, 61 pm/◦C and quality factor of 2506.5. Its structure is very compact with total size 115.422 μm2, which is suitable for nanotechnology based sensing applications.

HIGH SENSITIVITY TEMPERATURE SENSOR BASED ON PHOTONIC CRYSTAL RESONANT CAVITY