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Abstract—A new deembedding method in permittivity measurement of ferroelectric thin film material is proposed in this paper. By measuring the two scattering matrixes of the two samples with different length, the propagation constant of the actual network under test (ANUT) can be obtained. Further more, the permittivity would be extracted. The results show that though the proposed deembedding method, the error induced by embedding can be eliminated successfully and,the propagation constant of the ANUT can,be extracted accurately.

A NEW DEEMBEDDING METHOD IN PERMITTIVITY MEASUREMENT OF FERROELECTRIC THIN FILM MATERIAL