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This work proposes a novel method of Thomson microwave scattering for electron number density measurements of miniature plasmas at pressures < 10 Torr. This method is applied to determine electron number density in a positive column of glow discharge initiated at 5 Torr in air with a plasma column diameter of 3.4 mm. The Thomson Microwave Scattering(TMS) system measured the electron number density to be 3.36*10^10 cm^-3. The result obtained using the TMS system was validated against the measurements made using the well-known technique of microwave quarter-wave hairpin resonator. Measurements with the hairpin resonator yielded an electron number density of 2.07*10^10 cm^-3 providing adequate agreement with the TMS system.

Thomson microwave scattering for electron number density diagnostics of miniature plasmas at low pressure