Si-DLC Films Using a Plasma Based Ion Implantation Technique with Positive-Negative High Voltage Pulses (I)-Effect of Si Content for Thermal Resistance, Friction and Wear- | Zendy

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Si-DLC Films Using a Plasma Based Ion Implantation Technique with Positive-Negative High Voltage Pulses (I)-Effect of Si Content for Thermal Resistance, Friction and Wear-

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