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In this paper, a new composite actuator, which consists of a bimorph piezoelectric plate and a metal cap, was proposed for micro-TAS (Total Analysis Systems) which is widely used for chemical, biological and medical devises. The main objective of this work is to verify the displacement amplification introduced by a new design of composite actuator. At first, the proposed disc-shaped composite actuator was modeled and the static deflection was compared with conventional ones which are monomorph, bimorph actuators and a composite actuator called "Moonie". Additionally, the proposed composite actuator was applied to a valve-less pump in a Y-shaped fluid channel and a piezoelectric-fluid interaction finite element simulation was performed. Computations demonstrated the superior performance of the new composite actuator compared with conventional ones.

Piezoelectric-fluid interaction finite element analysis of a valve-less piezoelectric pump