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Poly(vinyl alcohol) (PVA) having N-(1-methyl-4-(1, 2, 4-triazolio))-benzamidate (MTB) was synthesized through acetalization of PVA and 4-dimethoxymethyl-N-(1-methyl-4-(1, 2, 4-triazolio))benzamidate (DMMTB) in water. The UV spectrum of PVA-MTB shows a characteristic absorption of triazolium ylide at 265nm in methanol, at 271nm in ethanol, and at 269nm as a film, respectively. These absorption bands decreased on irradiation at 308nm. The photoreaction of the PVA-MTB film proceeds at the same magnitude as those of DMMTB bothin methanol and in ethanol. After irradiation the film became insoluble in water, and the soluble fraction of polymer was 3.7% at the MTB content in 1mol% and less than 2% at that in more than 2mol%. The structure of 2μm range has been obtained by using this photofunctional polymer with the sensitivity of 1x103mJ/cm2. PVA-MTB can be used as a water soluble negative photoresist.

Photoreaction of poly(vinyl alcohol) having n-(1-methyl-4-(1,2,4-triazolio))benzamidate.