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We have previously reported on the fluorinated positive type polyimide protected by tert-buthoxycarbonyl group (t-BOC)1). However, this system has some problems from practical point of view. As their examples, the polymer synthetic yield is not sufficient. K+ ion, which may damage to the electronic devices, further exists in the finally obtained polyimide as t-BOC group normally introduces to the hydroxyl polyimide in the presence of potassium tert-butoxide. Tetrahydropyranyl group (THP) is well known as a convenient hydroxyl protecting regent in the field of organic synthesis. THP is easily protected and deprotected from hydroxyl group in the conventional organic acid2) and therefore applied to a photoresist system using chemical amplification process3'4). In this letter, we report on the properties of a photoreactive fluorinated polyimide protected by THP group based on chemical amplification. A kinetics for THP acidolysis in the fluorinated polyimide film is also discussed.

journal of photopolymer science and technology

Photoreactive Fluorinated Polyimide Protected by Tetrahydropyranyl Group(THP) Based on Photoinduced Acidolysis. Properties and kinetics for acidolysis.