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The durability and transfer properties of several replica molds were evaluated. Replica molds with patterns of holes or pillars were fabricated by ultraviolet nanoimprint lithography (UV-NIL) from an epoxy-type UV-curable resin. The resin had an antifouling effect, permitting the fabrication of replica mold without the use of a release agent. The transfer properties of the molds were evaluated by contact-angle measurements on the mold and by scanning electron microscopy of the UV-NIL transferred pattern. The error rates were calculated from the scanning electron micrographs and the values was used to assess the lifetimes of the replica molds. The thickness of the residual layer of the replica mold was controlled by changing the roll-press method. A replica mold with a thick residual layer showed a longer lifetime than one with a thin residual layer. In addition, the use of a cushion material was effective in improving the lifetime. Molds with hole patterns showed a longer lifetime than those with pillar patterns, and a lifetime of around 1000 repetitions was achieved. Keyword: Ultraviolet nanoimprint lithography, photocurable polymer, release agent, replica mold, nanotechnology

Durability and Transfer Properties of a Release-Agent-Free Replica Mold for Ultraviolet Nanoimprinting