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Oxime esters have been known to be excellent photo-acid generators (PAGs). However, the behaviors of alicyclic oxime esters to act as PAG have yet to become clear. Some oxime esters with adamantly groups were prepared, and their spectra and thermal stabilities were measured. The quantum yields of acid generation (acid) in acetonitrile were measured. These PAGs were then evaluated for lithography materials with a base polymer. They have a good transparency in DUV areas. These physical properties and the performance of PAG depended on the acid precursor group and the substitution group at the C atom of C=N-O part in the oxime esters.

Oxime Type Photoacid Generators Having Adamantyl Group