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Quantitative evaluation of template release energy is reported for UV nanoimprint resists containing various kinds of fluorinated segregation agents. The template release energy is evaluated based on fracture mechanics for various types of UV curable resists in which a fluorinated segregation agent is dissolved. The template release energy is effectively reduced. The higher molecular weight agent containing a hydrophilic group effectively reduces the energy by 5/6. The defect ratio in nanoimprint lithography is also examined. The result shows that the defect ratio is effectively reduced by the use of fluorinated segregation agents.

Evaluation of Template Release Energy with Use of Fluorinated Segregation Agents for UV Nanoimprint Resists