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DPAT (Direct Peeling by using AFM tip) method provides direct measurement of a peeling force of micro-structure. A peeling force of micro polymer pattern at different peeling height is analyzed. When a cantilever is made a contact with a bottom of pattern, peeling force and displacement of cantilever are larger than in those of pattern top. The cantilever motion is analyzed peeling phenomena in different peel height. The peeling force of pattern is determined to around 1μN. The peeling force applying at pattern bottom reflects the adhesion force. The effectivity and accuracy of the DPAT method is discussed.

Micro Cantilever Motion in Micro Pattern Peeling by DPAT Method