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Direct Methanol Fuel Cell (DMFC) consists of a perflurosulfonic acid (PFSA) electrolyte is attractive as a portable power source. It is possible to fabricate a DMFC array by dividing a PFSA film into micro pieces by photolithography. In this regard, it is known that photoresist film causes significant compressive and tensile stress generation in an underlying layer. Then it is needed to control preparation condition of photoresist film formed on a PFSA film. The effect of compressive load in a PFSA film is observed as enhancement of electro motive force. By applying compressive load to a PFSA film, proton ionic conductivity would be enhanced. On the other hand, a tensile load acts to decrease electro motive force. Therefore photoresist pattern shape should be designd effectively in order to enhance proton ionic conductivity of PFSA film.

Mechanical Stress Effect on Ionic Conductivity of Perflurosulfonic Acid (PFSA) Film by Photolithography