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1 Department of Chemistry and Materials Engineering, Faculty of Chemistry, Materials and Bioengineering, Kansai University, 3-3-35, Yamate-cho, Suita-shi, Osaka, 564-8680, Japan. 2 Department of Material and Life Chemistry, Faculty of Engineering, Kanagawa University, Rokkakubashi, Kanagawa-ku, Yokohama, 221-8686, Japan. 3 Selete (Semiconductor Leading Edge technologies, Inc.) Research Dept.3 16-1, Onogawa, Tsukuba, Ibaraki 305-8569, Japan. 4 Laboratory of Advanced Science and Technology for Industry, University of Hyogo, 1-1-2 Kouto, Kamigouri, Ako-Gun, Hyogo, Pref 678-1205, Japan. *E-mail: kudoh@kansai-u.ac.jp

Extreme Ultraviolet (EUV)-Resist Material Based on Noria (Water Wheel-like Macrocycle ) Derivatives with Pendant Alkoxyl and Adamantyl Ester Groups