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Advanced Tech. RED Center, Mitsubishi Electric Corp., 8-1-1, Tsukaguchi-honmachi, Amagasaki, HyogoPref 661-8661, Japan, toyoshima. toshiyuki@wrc. me/co. co jp *ULSI Development Center, Mitsubishi Electric Corp., 4-1, Mizuhara, Itami, Hyogo Pref. 664-8641, Japan ** BU Electronic Materials , Clariant(Japan) K K, 3810, Chihara, Daito-cho, Ogasa-gun, Sizuoka437-1496, Japan

Below 100-nm Hole Pattern Formation Using Resolution Enhancement Lithography Assisted by Chemical Shrink (RELACS).