English (United Kingdom)

https://curated-unify.zendy.io/wp-json/zendy-region/v1/featured_content/oa?rat=en

https://curated-unify.zendy.io/wp-json/zendy-region/v1/highlighted_journal/

Global: Zendy Plus annual

Presents the access of premium content as premium feature

Premium Content

Presents the keyphrase highlighting as premium feature

Keyphrase Highlighting

Presents the summarisation as premium feature

Summarisation

Insights

Presents the pdf analysis as premium feature

PDF Analysis

Presents the zaia usage as premium feature

ZAIA

Global: Zendy Tools annual

Global: Zendy Free Plan

Global: Zendy Tools monthly

Global: Zendy Plus monthly

Changes of discharge state in inductively coupled plasma (ICP) were investigated by use of a radio frequency (RF) impedance analyzer. A voltage loaded on the ICP coil and a current flowing within the coil were plotted against the RF power, and the two curves exhibited similar patterns. The discharge states, i.e., the E mode, the H mode, and an appearance of the skin effect were inferred from the curves and a theoretical interpretation by use of a circuit model. The inference was also supported by curves of a real part of load impedance and of a load impedance phase angle versus the power.

Simple Monitoring of Discharge State in Inductively Coupled Plasma Using Radio Frequency Impedance Analyzer.