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A multilevel computer generated hologram (CGH) was fabricated for shaping a laser beam profile of a high-power CO2 laser. The surface relief has eight height levels with 0.94μm in step heights. A copper surface relief was formed on a flat copper substrate by electroplating with photo-resist masks. Standard deviation of the surface step height was less than 22% of the designed height. The CGH changes a CO2 laser beam of 14mm in diameter to a rectangular beam of 1mm×4mm and its diffraction efficiency was 69.2%. A 200W CO2 laser beam of 14mm in diameter did not damage the CGH surface.

Fabrication of Multilevel Copper Computer Generated Hologram for High Power CO2 Laser Beam Shaping