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1. Euclidean Symmetry Detection from Scanned Meshes of Mechanical Objects based on a Combination of ICP and Region Growing Algorithms Tomohiro MIZOGUCHI and Satoshi KANAI Recently scanned meshes from mechanical objects can be easily acquired using high-energy industrial X-ray CT scanning technologies, and these meshes are widely used in various fields of product developments. Mechanical objects often exhibit symmetries for their functionality. They are originally defined by creating a copy of the solid and then by placing it with a certain transformation including an arbitrary set of translations, rotations, and reflections. Therefore it is desired to detect such symmetries from the scanned meshes for their effective use in mesh applications, such as reconstruction of CAD models with compact data representations or CAE mesh enhancement using the symmetries. In this paper, we propose a method that can detects multiple Euclidean symmetries from scanned meshes of mechanical objects based on a combination of ICP and region growing algorithms. We define Euclidean symmetries detection as to detect both pairs of regions that match under certain transformations and their transformations including arbitrary sets of translations, rotations, and reflections. We also propose a method that derives all possible sequences for reconstructing an entire model from the original mesh using planar-reflective symmetries among all the detected symmetries, and represents them in an AND/OR graph in order to compactly represent the mesh. Our proposed method contains several advantages. It can robustly detect symmetries from noisy scanned meshes that include many planar regions. Our method also can detect both global and local Euclidean symmetries from meshes. Moreover it can detect maximally large pairs of regions under user specified tolerances. We demonstrate the effectiveness of the proposed method from various experiments using X-ray CT scanned meshes of mechanical objects. 2. A Precision Instrument for 3D Edge Profile Measurement of Single Point Diamond Micro-Cutting Tools Takemi ASAI, Yoshikazu ARAI and Wei GAO This paper describes an instrument for 3D edge profile measurement of diamond micro-cutting tools used for ultra-precision fabrication of micro-structures. The measurement targets of this instrument are round-nose tools with nose radii of less than 100 μm. The core elements of the instrument are an atomic force microscope (AFM) for profile measurement of the tool edge and an optical sensor for alignment of the AFM cantilever tip with the tool edge. A three-axis closed-loop controlled PZT scanner is employed in the AFM for high-accuracy profile measurement and DC-servo-motor-driven stages are employed in the alignment mechanism for automatic alignment. Measurement experiments of micro-tools with nose radii of 30 μm and 8 μm are carried out, respectively. Cutting edge radii, nose local radii and edge contour roundness are evaluated based on the 3D edge profile measurement data. 3. Fundamental investigation of subsurface damage in single crystalline silicon caused by diamond machining Jiwang YAN, Tooru ASAMI, Hirofumi HARADA, Tsunemoto KURIYAGAWA Single crystalline silicon was plunge-cut using diamond tools at a low speed. Cross-sectional transmission electron microscopy and laser micro-Raman spectroscopy were used to examine the subsurface structure of the machined sample. The results showed that the thickness of the