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The research that micro-machining of the square on the surface (100) of single crystal silicon by the machining cantilever installed in friction force microscope is presented in this paper. It was found that the machined area is changed into striking convex after the work piece is etched by KOH solution. The relation that the height of the convex depends on the machining conditions especially on the concentration of KOH solution is understood. In order to understand the contrary etching results, the structure of machined surface was analyzed by TEM(transmitting electronic microscope) and Laser Raman Method, The result that thick oxidation and beneath deterioration exisited in the surface was showed. Moreover, the efficiency of ultrasonic cleaning combined with etching to improve the roughness and removing of the remained is confirmed. And the method of maskless formation of micro-structure as the application of the experimental results is proposed.

Micro-Fabrication of Single Crystal Silicon by Using Combination Technique of Nano-scale Machining and Alkaline Etching.