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Atomic-level material removal process of HOPG (Highly Oriented Pyrolytic Graphite) is analyzed by STM (Scanning unneling Microscope) and MD (Molecular Dynamic) simulation. By using STM tip scanning system, the material removal such as indentation and scratching is carried out in atomic scale. This deformation process is also analyzed by MD computer simulation. The trace on several nanometers generated by STM tip machining is observed, but undeformed region which shows typical atomic arrangement of graphite is recognized near from the deformation region. Good consistency between experiment and calculation can be found.

Atomic-level Material Removal Mechanism of Graphite Studied by STM and MD.