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Influence of the grain size of diamond stone on the superfinishing performances is investigated experimentally. The mechanism of chip formation is investigated by observing the shape of chips and the finished surfaces of workpiece with scanning electron microscope. The work materials used are alumina (Al2O3), silicon carbide (SiC), silicon nitride (Si3N4) and zirconia (ZrO2), which are sintered under the atmospheric pressure, and Mn-Zn ferrite, which is sintered under HIP. The grain size of stone is changed from # 500 to # 8 000. The results are as follows. The diamond stone with suitable bonding strength makes it possible to remove the work material as chips even if its grain size is finer than # 1 000. Two types of chips are obserbed; one is the crack-type chips which are made by brittle fracture, and the other is the flow-type chips which are made by plastic deformation. As the grain size of stone becomes smaller, the shape of chips changes from crack-type to flow-type. The critical grain size is dependent on the work materials and it becomes smaller in the order of ZrO2, Mn-Zn ferrite, Al2O3, Si3N4 and SiC. The condition of making the flow-type chips is important to obtain the mirror surface of ceramics

Superfinishing of Fine Ceramics. Influence of Grain Size on Finishing Performance.