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This paper presents the flatness change of attracting surface of vacuum chuck based upon elastic and thermal deformations of the chuck and spindle. Increase in the centrifugal force causes a concave flatness change of the surface, for example approx. -0.2 μm. Probe traversing method is proposed to obtain the surface profile. Heat generated by the spindle rotation causes nearly uniform temperature increase of the chuck surface. However, thermal deformation causes a convex flatness change of the surface, for example approx. 2 μm, because the chuck is fastened at the outer portion with steel bolts of which thermal expansion coefficient is less than that of aluminum chuck.

seimitsu kōgakkaishi/seimitsu kougakkaishi

Flatness change of vacuum chuck surface by elastic and thermal deformations. Experimental analysis on hydrostatic oil spindle for ultra-precision turning.