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Environmentally acceptable lead-free ferroelectric KNbO3 (KN) or NaNbO3 (NN) and K0.5Na0.5NbO3 (KNN) thin films were prepared using a modified sol-gel method by mixing potassium acetate or sodium acetate or both with the Nb-tartrate complex, deposited on the Pt/Al2O3 and Pt/SiO2/Si substrates by a spin-coating method and sintered at 650°C. X-ray diffraction (XRD) analysis indicated that the NN and KNN films on the Pt/SiO2/Si substrate possessed a single perovskite phase, while NN and KNN films on the Pt/Al2O3 substrate contained a small amount of secondary pyrochlore phase, as did KN films on both substrates. Scanning electron microscopic (SEM) and atomic force microscopic (AFM) analyses confirmed that roughness Rq of the thin KNN/Pt/SiO2/Si film (≈ 7.4 nm) was significantly lower than that of the KNN/Pt/Al2O3 film (≈ 15 nm). The heterogeneous microstructure composed of small spherical and larger needle-like or cuboidal particles were observed in the KN and NN films on both substrates. The homogeneous microstructure of the KNN thin film on the Pt/SiO2/Si substrate was smoother and contained finer spherical particles (≈ 50 nm) than on Pt/Al2O3 substrates (≈ 100 nm). The effect of different substrates on the surface morphology of thin films was confirmed.

Effect of substrate on phase formation and surface morphology of sol-gel lead-free KNbO3, NaNbO3, and K0.5Na0.5NbO3 thin films