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Abstract Diamond and/or carbon thin films are in the center of interest due to their variability and extraordinary combination of intrinsic properties. However, some applications require fabrication of films with tailored properties. Especially, fabrication of periodic structures is highly attractive due to their increased surface area. In this contribution we point out the key technological aspects for fabrication of micro- and nano-sized carbon-based structures. Three representative structures are presented: diamond nanorods, self-assembled templates and self-standing diamond membranes. We found that the diameter of diamond nanorods can be controlled in a broad range from 10 to 200 nm by the masking material (Au vs Ni) and its initial thickness (from few to tens of nanometers). The assembly of polystyrene microspheres in mono- or multi-layer with square or hexagonal periodicities was controlled by the spin-coating parameters. The diamond porous membrane was selectively grown on Si substrate with an interdigital or mesh like geometry. Advantages of each structure as well as the fabrication limitations are discussed more in detail and finally their representative applications are pointed out.

Technological Aspects in Fabrication of Micro- and Nano-Sized Carbon Based Features: Nanorods, Periodical Arrays and Self-Standing Membranes